DETACHABLY ATTACHING DEVICE, TEST HEAD, AND ELECTRONIC RART TEST DEVICE

摘要

an engagement shaft (522) which can be engaged with a lower surface (502) of a DSA (501) and held in such a way that rectilinear movement can be performed; an air cylinder (521) supplying a drive force for rectilinearly moving the engagement shaft (522); and a link mechanism (530) arranged between the air cylinder (521) and the engagement shaft (522) and transmitting the drive force inputted from the actuator to the engagement shaft (522). The link mechanism (530) transmits the drive force inputted from the air cylinder (521) by rotational movement.