| 摘要 |
PROBLEM TO BE SOLVED: To provide a material making a piezoelectric single crystal oscillator used for wave devices such as filters, oscillators and gyroscopes, and devices using the piezoelectric single crystal oscillator, small and highly sensitive, also having an electromechanical bonding coefficient k<SB>12</SB>of 18% or more larger than that of a langasite-based single crystal of chemical formula of Sr<SB>3</SB>Ga<SB>2</SB>Ge<SB>4</SB>O<SB>14</SB>, and having an etching rate of 0.8μm/min or more which is faster than that of quartz. SOLUTION: The piezoelectric single crystal composition is expressed by chemical formula M1<SB>X</SB>M2<SB>3-X</SB>Ga<SB>5-X</SB>Ge<SB>X+1</SB>O<SB>14</SB>, in which M1 is a bivalent metal and M2 is a trivalent metal, and 0.5≤X≤2.0. In the chemical formula, it is desirable that M1 is at least one kind selected from the group consisting of Mg, Ca, Sr and Ba, and M2 is at least one kind selected from the group consisting of La, Nd and Pr. COPYRIGHT: (C)2009,JPO&INPIT
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