| 摘要 |
The purpose of the present invention is to provide a laser processing apparatus that can monitor variation of output power of a laser beam radiated by laser beam radiation means or a radiation position of the laser beam. A laser beam radiation unit of a laser processing apparatus includes a pulse laser oscillator, a condenser that converges and radiates a pulse laser beam on a workpiece held on a chuck table, a dichroic mirror disposed between the pulse laser oscillator and the condenser, a stroboflash radiation unit that radiates light on a route of the dichroic mirror and the condenser, a beam splitter disposed between the stroboflash radiation unit and the dichroic mirror, and an image pickup unit disposed on the route of the light split by the beam splitter. A control unit makes the stroboflash radiation unit and the image pickup unit operate in a timed manner when the pulse laser beam oscillated from the pulse laser beam oscillator and radiated on the workpiece and detects a processed state based on an image signal from the image pickup unit. |
