THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS

摘要

A three-dimensional shape measurement apparatus includes an air-slider outer frame, an air-slider hollow shaft movable in an axial direction in the outer frame, two support arms, two driving portions, and two support portions. The air-slider hollow shaft is provided with a through-hole to form an optical path connecting a focus optical system on an upper end and a probe portion on a lower end. The support arms protrude from both sides of the hollow shaft in a lateral direction, at vertical positions corresponding to an integration gravity center of the focus optical system, the probe portion, and the hollow shaft, symmetrically with respect to a central axis of the hollow shaft. The driving portions are located at positions in the vicinity of the hollow shaft in the support arms, symmetrically with respect to the central axis of the hollow shaft. The driving portions drive the hollow shaft in the axial direction with respect to the outer frame. In the support arms, the support portions are disposed further away from the hollow shaft than the driving portions, symmetrically with respect to the central axis of the hollow shaft, and support the support arms movably in the lateral direction.