MEMS-BASED CALORIMETER, FABRICATION, AND USE THEREOF

摘要

MEMS-based calorimeter including two microchambers supported in a thin film substrate formed on a polymeric layer is provided. The thin film substrate includes a thermoelectric sensor configured to measure temperature differential between the two microchambers, and also includes a thermally stable and high strength polymeric diaphragm. Methods for fabricating the MEMS-based calorimeter, as well as methods of using the calorimeter to measure thermal properties of materials, such as biomolecules, or thermodynamic properties of chemical reactions or physical interactions, are also provided.

主权项

1. A microdevice for calorimetric measurement, comprising
a first thermally isolated microchamber; a second thermally isolated microchamber; a thin film substrate formed on a polymeric layer; wherein the first thermally isolated microchamber and the second thermally isolated microchamber are identical in volume and configuration, and arranged side by side, each supported on the thin film substrate, wherein the thin film substrate has a first side constituting a floor of the first and second microchambers and a second side opposing the first side, wherein the thin film substrate comprises a thermoelectric sensor located under each of the first and second thermally isolated microchambers and configured to measure the temperature differential between the first and second thermally isolated microchambers; and wherein the thin film substrate includes a polymeric diaphragm made of a material having a glass transition temperature greater than 150° C. and thermal decomposition temperature greater than 250° C.