| 摘要 |
A three-dimensional shape measurement apparatus comprises: main pattern illumination units; main image pickup units; and a control unit. The main pattern illumination units obliquely illuminate, toward a measurement object, grid pattern light from different directions. The main image pickup units receive reflected light of the grid pattern light which is illuminated from the main pattern illumination units to the measurement object and then obliquely reflected from the measurement object, and obtain a grid pattern image of the measurement object. The control unit calculates height data of the measurement object using the grid pattern images of the measurement object, or calculates the height data of the measurement object using an image formation location of planar images of the measurement object and texture information of the measurement object, wherein the height data of the measurement object is calculated by using the grid pattern illuminated to the measurement object as the texture information. Accordingly, three-dimensional shapes can be measured more easily and accurately. |
