| 摘要 |
PURPOSE:To obtain the titled molded article releasing no particles and having a long endurance life by bringing a mixture of silica glass powder with carbon powder into a reaction by heating in a flow of an inert gas and by press- molding the resulting reaction product. CONSTITUTION:A mixture of silica glass powder with high purity carbon powder is heated to 1,500-1,900 deg.C while being suspended in a flow of an inert gas mixed with gaseous N2. Silica glass and carbon take part in an SiC forming reaction, and silica glass, carbon and N2 take part in an Si3N4 forming side reaction, so a reaction product contg. SiC and Si3N4 distributed uniformly in silica glass is obtd. The reaction product is press-molded to obtain a molded article of silica glass having a high softening point and high heat resistance.
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