| 摘要 |
PURPOSE:To position an object to be positioned at a preset place at high accu racy by using a table capable of dislocating in all directions and around a vertical axis and a television camera. CONSTITUTION:A sheet 2 to be positioned is placed on a table 1. Marks 2a and 2b provided on the sheet 2 are picked up by television cameras A and B independently. The picked-up mark position is positioned in a preset origin at high accuracy by controlling the table 1. Afterward, another sheet 5 to be overlapped with the sheet 2 is transported and overlapped with the sheet 2 at high accuracy. Thus the subject to be positioned can be positioned at the preset place at high accuracy.
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