| 摘要 |
PURPOSE:To obtain the titled molded article releasing no particles and having a long endurance life by bringing a mixture of silica glass powder with carbon powder into a reaction in a flow of a gas contg. nitrogen and by press-molding the resulting reaction product. CONSTITUTION:A mixture of silica glass powder with a small amount of carbon powder is heated to 1,200-1,600 deg.C while being suspended in a flow of a gas contg. nitrogen. Part of the silica glass reacts with N2, forming Si3N4, and a reaction forming a small amount of SiC takes place, so a reaction product contg. Si3N4 and SiC distributed uniformly in silica glass is obtd. The reaction product is press-molded to obtain a molded article of silica glass having a high softening point and high heat resistance.
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