发明名称 Observation of phase information and interference device therefor.
摘要 The invention is directed to a method for observing phase information and an interference device for observing phase information, using electron or other waves with the amplitude difficult to split as by a half mirror. Using an interference device comprising in combination two scattering films A1 and A2 capable of scattering incident waves randomly, first lens systems B1 and B2 that are located between said two scattering films to form the image of one scattering film Al on the other scattering film A2, a second lens system B3 for forming on an observation surface C the image of a specimen 2 located at a position where a component going straight through said one scattering film is converged in a spot form through said first lens system or a part thereof, and means for recording an interference pattern formed on the observation surface C, an interference pattern is detected while the specimen 2 is inserted in the arrangement, and an interference pattern is detected while the specimen 2 is removed from the arrangement, so that the difference between both the interference patterns, or the sum or product of them, can be found to observe the phase information of the specimen directly as interference fringes. <IMAGE>
申请公布号 EP0583162(A1) 申请公布日期 1994.02.16
申请号 EP19930306341 申请日期 1993.08.11
申请人 RESEARCH DEVELOPMENT CORPORATION OF JAPAN;ENDO, JUNJI;TONOMURA, AKIRA 发明人 RU, QING XIN;ENDO, JUNJI;TONOMURA, AKIRA
分类号 G02B27/50;G03H1/04;G03H5/00;H01J37/26;H01J37/295 主分类号 G02B27/50
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