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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
EP0707663(A4)
申请公布日期
1998.01.14
申请号
EP19940921324
申请日期
1994.06.17
申请人
DEPOSITION SCIENCES, INC.
发明人
BARTOLOMEI, LEROY, ALBERT;READ, THOMAS
分类号
C23C14/34;C23C14/00;C23C14/35;C23C14/56;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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