发明名称 Vibration actuator
摘要 A vibrator actuator provides a drive force by vibrating a vibration element in response to an input signal. The vibration element includes a piezoelectric element which imparts vibration to the vibration element in response to an electrical signal. The vibration element is in compressive contact with and moves with respect to a relative moving member. The relative moving member may be planar, circular or toroidal. The relative moving member has first and second surfaces with said first surface being an adherent material removal surface. The adherent material removal surface removes wear particles which become adhered to the vibration element and the relative moving member. The relative moving member may have a number of first and second alternating surfaces to increase effectiveness. The second surfaces may be non-perpendicular with respect to a movement trajectory of the vibration element to decrease resistance during contact with the vibration element.
申请公布号 US5866970(A) 申请公布日期 1999.02.02
申请号 US19970781054 申请日期 1997.01.09
申请人 NIKON CORPORATION 发明人 OONE, KAZUYASU;KOBAYASHI, MINA
分类号 H02N2/00;H01L41/08;H01L41/09;(IPC1-7):H01L41/08 主分类号 H02N2/00
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