| 摘要 |
<p>The microactuator (1) comprises an outer stator (2'), and an inner rotor (4) electrostatically coupled to the stator (2'). The rotor (4) comprises a suspended mass (6) with a substantially circular shape, and a plurality of mobile arms (8) extending radially towards the exterior, starting from the suspended mass (6). The stator (2') has a plurality of pairs of fixed arms (22a', 22b', 22a'', 22b'') extending radially to the suspended mass (6), a respective mobile arm (8) being arranged between each pair of fixed arms. The fixed arms (20a', 20b', 20a'', 20b'') are divided into fixed drive arms (20a', 20b') connected to a drive stage (30) for actuating the microactuator (1'), and into fixed measure arms (20a'', 20b'') connected to a measure stage (32), and define a capacitive uncoupling structure (34'). <IMAGE> <IMAGE></p> |
