PROBE CARD AND METHOD OF PRODUCING THE SAME

摘要

A probe card (100) comprising contactors (92), a substrate (94), a signal transmission passageway (96), a grounding conductor (98) and a hole (102). The signal transmission passageway (96) is formed on the substrate (94). The substrate (94) is made of dielectric material or semiconductor material. The contactors (92) are formed of metallic glass material at the front end of the signal transmission passageway (96) on one side of the substrate (94). Use of minute patterning technique for metallic glass material makes it possible to make the contactors (92) in a very thin form. The contactors (92) are located above the hole (102) and spaced away from the substrate (94). The contactors (92) have elasticity in a direction normal to the surface of the substrate (94), and it becomes possible for them, during test, to elastically contact a connection terminal formed on a circuit to be tested. The probe card (100), which is formed with contactors (92) of metallic glass material, is capable of transmitting high frequency signals to an integrated circuit having a number of narrow-pitch pads.