Free expansion high frequency plasma modular reactor includes plasma chamber with extended gas retention time below recombination chamber

摘要

The free-expansion high-frequency plasma modular reactor has two chambers respectively containing the plasma and for low-temperature recombination of the reagents. The metal barrier (6) above the plasma chamber extends the gas retention time of the chamber and, like the other metalwork (1,9), has an earthed external metal cover mesh (16). The gases in the two chambers are analyzed independently via connectors (14) and pipes fixed to the top (9) of the reactor.