PIEZOELECTRIC VIBRATION CHIP, PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, GYROSCOPE SENSOR, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To overcome the problem that a conduction electrode made of a chromium layer is lost because even the chromium layer (background metallic layer) is removed by etching during etching.

SOLUTION: The piezoelectric vibration chip is configured with: a drive electrode formed with an electrode pattern comprising a piezoelectric flat substrate, a first metallic layer formed on the surface of the piezoelectric substrate, a second metallic layer formed on the surface of the first metallic layer, and a third metallic layer formed on the surface of the second metallic layer and made of the same metal as that of the first metallic layer; the conduction electrode formed with the electrode pattern electrically connected from the drive electrode; a support electrode formed with the first and second metallic layers electrically connected to the drive electrode by the conduction electrode; and an insulation surface protective layer formed to cover at least the electrode pattern except the support electrode.

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