PIEZOELECTRIC VIBRATING GYROSCOPE ELEMENT AND PIEZOELECTRIC VIBRATING REED

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating gyroscope element and a piezoelectric vibrating reed capable of reducing the occurrence of breakage of vibrating arms when an excess force is applied to the vibrating arms in the piezoelectric vibrating gyroscope element and the piezoelectric vibrating reed provided with groove parts at each vibrating arm.

SOLUTION: The piezoelectric vibrating gyroscope element is provided with a base part 11; detection vibrating arms 12 extended from the base part 11; and drive vibrating arms 16 extended from base parts 15. One main surfaces and the other main surfaces of the detection vibrating arms 12 and the drive vibrating arms 16 are each provided with groove parts 20 and 21. In the groove parts 20 and 21 in a plan view, corner parts 23 and 25 of each terminal of the groove parts 20 and 21 are formed in a chamfered shape.

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