| 摘要 |
There is provided a device for removing droplets in a plasma generator by which droplets can be surely separated from a plasma traveling from an arc discharge section and can be certainly removed, so that it can be prevented for the droplets to reach an article being processed. A tubular traveling passage (3) through which plasma P and droplets D travel under mixed state is formed, an aperture (6) having a passing hole (6a) at an eccentric position is provided in the tubular traveling passage (3), and a magnetic field generating means for passing the plasma P through the eccentric passing hole (6a) of the aperture (6) is arranged on an outer circumference of the tubular traveling passage (3). The plasma P passes through the eccentric passing hole (6a) of the aperture (6) after being bent in the tubular traveling passage (3) by a magnetic field generated from the magnetic field generating means and the droplets D are removed by colliding against the wall face of the aperture (6) at the time of bending.
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