CONDITIONING DEVICE, BUFF PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS, DRESSER, AND CONDITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a compact conditioning device capable of performing the conditioning of more than one type.SOLUTION: A conditioning device for conditioning a buff pad for use in buff processing includes a base plate configured rotatably, a first conditioning section provided in the installation region of the base plate, and a second conditioning section provided in the installation region of the base plate, and having the conditioning characteristics different from those of the first conditioning section.SELECTED DRAWING: Figure 6A