DECOMPRESSION DRYING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

摘要

According to the problem to be solved, in a seat type substrate drying apparatus having a multistage chamber type decompression drying apparatus, decompression movement of all chambers can be dealt with by a single vacuum pump. According to a solution, the decompression drying apparatus comprises: a plurality of decompression chambers; a single vacuum pump in which an air inlet hole is accessed to each chamber via a pipe; a valve controlling an exhaust and decompression state of each chamber, and individually installed in the pipe by corresponding to each chamber; and a control device controlling each valve in accordance with a predetermined decompression sequence.