MICROFUSED SILICON STRAIN GAUGE (MSG) PRESSURE SENSOR PACKAGE

摘要

The present invention provides a method and an apparatus related to a microfused silicon strain gauge (MSG) pressure sensor. According to the present invention, a pressure sensor package comprises: a sensing element configured to be exposed to a pressure environment and having at least one strain gauge; an electronic package disposed on a carrier and electrically coupled to the sensing element, wherein the carrier is disposed on a port having the sensing element and the port can reduce a sealing force in an axial direction, a decoupling feature related to the accompanying sealing force, and the length of the port; a housing disposed near the sensing element and the electronic package; and a connector connected to the housing, electrically connected to the electronic package, and having an external interface.