| 发明名称 |
BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME |
| 摘要 |
A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode disposed on the substrate, and a piezoelectric layer disposed between the first electrode and the second electrode. At least one of the first electrode and the second electrode includes an alloy of molybdenum and tantalum. |
| 申请公布号 |
US2016373083(A1) |
申请公布日期 |
2016.12.22 |
| 申请号 |
US201615184230 |
申请日期 |
2016.06.16 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
LEE Tae Kyung;HAN Sung;LEE Hwa Sun;SHIN Seung Joo;SHIN Ran Hee |
| 分类号 |
H03H9/58;H03H9/17;H03H9/54 |
主分类号 |
H03H9/58 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A bulk acoustic wave resonator comprising:
a substrate; a first electrode and a second electrode disposed on the substrate; and a piezoelectric layer disposed between the first electrode and the second electrode, wherein at least one of the first electrode and the second electrode includes an alloy of molybdenum and tantalum. |
| 地址 |
Suwon-si KR |
