| 摘要 |
PROBLEM TO BE SOLVED: To detect the center of a sample correctly by performing scanning measurement in X and Y directions using an X-ray beam, determining the intensity of fluorescent X-ray at each point and then calculating the center of gravity of the sample based on the intensity of fluorescent X-ray and the X and Y coordinates. SOLUTION: A circular sample is aligned using a monitor for observing a sample and the coordinate of a temporary center is determined before scanning measurement is performed with reference to the coordinate of the temporary center. In the scanning measurement, the sample is irradiated with an X-ray beam and the intensity of fluorescent X-ray is determined and then the center of gravity is calculated based on the X coordinate at each measuring point and the intensity of fluorescent X-ray thus determining the X coordinate 10 at the center of the sample. Subsequently, scanning measurement is performed in Y direction by irradiating an X-ray beam with reference to the X coordinate 10 at the center and the Y coordinate of the temporary center thus determining the intensity of fluorescent X-ray. Finally, the Y coordinate 12 at the center of the sample is determined by calculating the center of gravity based on the Y coordinate and the intensity of fluorescent X-ray at each measuring point. Center of the sample is detected based on the X and Y coordinates 10, 12 at the center of the sample thus determined. |
