MAGNETIC-FIELD SENSING INTEGRATED-CIRCUIT ARRAY

摘要

FIELD: quality control of ferromagnetic materials and parts. SUBSTANCE: array is manufactured using integrated-circuit technology in the form of silicon chip incorporating magnetic-field sensing cells of magnetic transistors integrated into array measuring N by M; magnetic- field sensing cells are spaced 100-200 mcm apart in definitely oriented manner within one chip and integrated on chip by metal interconnections so that number of leads designed for recording one, two, or three components of magnetic-induction vector is N+M+2 (or 4. or 6). EFFECT: improved reliability and spatial resolution, reduced number of data leads and reduced power requirement. 4 dwg