发明名称 Device and method for cooling hot spot in micro system
摘要 A device and method for cooling a hot spot are provided. The cooling device for cooling a micro hot spot includes a first substrate, a first channel formed on the first substrate and having two narrowed ends, a second channel formed on the first substrate and connected to the first channel, a cooling fluid injected into the first channel and the second channel, a second substrate connected to the first substrate and having the micro hot spot disposed thereon, two of wires disposed at the narrowed ends of the first channel, and a power supply for providing a pulse current to the wires, thereby micro bubbles being produced around the wires.
申请公布号 US2005167820(A1) 申请公布日期 2005.08.04
申请号 US20040866161 申请日期 2004.06.10
申请人 ORIENTAL INSTITUTE OF TECHNOLOGY 发明人 WANG MING-WEN
分类号 F28F13/10;H01L23/34;H01L23/473;H01S5/024;(IPC1-7):H01L23/34 主分类号 F28F13/10
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