发明名称 |
METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND ELECTRON DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a device which has sufficient resolution on a big screen or also a flexible substrate. SOLUTION: This method comprises the steps of: forming a first insulating layer on a substrate; forming a first film on the insulator using printing technique; and removing a predetermined portion of the insulator by using the fist film as a mask, using photographic exposure technique or etching technique. COPYRIGHT: (C)2007,JPO&INPIT
|
申请公布号 |
JP2007103947(A) |
申请公布日期 |
2007.04.19 |
申请号 |
JP20060272643 |
申请日期 |
2006.10.04 |
申请人 |
SEIKO EPSON CORP |
发明人 |
LI SHUNPU;NEWSOME CHRISTOPHER;RUSSEL DAVID;KUGLER THOMAS |
分类号 |
H01L21/336;H01L21/288;H01L29/417;H01L29/786;H01L51/05 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|