| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe device capable of performing alignment of a pair of cameras in a short time by optical means, without using any mechanical target.SOLUTION: In a probe device, the projection optical section 67 of a lower imaging unit generates an optical target mark, when the light irradiated from a projection light source 81 passes through a target 65. The target mark is projected to an imaging position P and the imaging part 61a of a lower camera 61, by the light irradiated from the projection light source 81. Since the imaging part 91a of an upper camera 91 and the imaging position P are arranged at positions optically conjugate each other, a target mark imaged at the imaging position P is also projected to the imaging part 91a of an upper camera 91.SELECTED DRAWING: Figure 3 |
