发明名称 積層シート、及び、積層シートを用いた半導体装置の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a laminated sheet which can prevent a decrease in adhesive force and electrical reliability of a resin composition layer, and in which back grind tapes can be stripped from a plurality of semiconductor devices in block after dicing.SOLUTION: A laminated sheet comprises: a back grind tape having a structure in which an adhesive layer is formed on a base; and a resin composition layer provided on the adhesive layer of the back grind tape. A tensile elasticity of the adhesive layer is 0.1 to 5.0 MPa at 23°C, The peel strength T between the adhesive layer and the resin composition layer is 0.1 to 5 N/20 mm under a condition of 23°C and 300 mm/minute.
申请公布号 JP5944155(B2) 申请公布日期 2016.07.05
申请号 JP20110271282 申请日期 2011.12.12
申请人 日東電工株式会社 发明人 千歳 裕之;田中 俊平
分类号 H01L21/304;H01L21/301;H01L21/52 主分类号 H01L21/304
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