| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of highly accurately and stably measuring a surface shape of a sample having a hard portion and a soft portion mixed therein.SOLUTION: A scanning probe microscope includes: a cantilever 12 having a probe 11 at its free end; a scanning unit 20 for three-dimensionally and relatively moving the probe 11 and a sample 19; a vibration unit 14 for vibrating the cantilever 12 on the basis of a vibration signal; and a displacement detection unit 15 for detecting displacement of the cantilever 12 and outputting a displacement signal. A mixed signal generation unit 30 includes: an amplitude information detection unit 31 for detecting amplitude information on the displacement signal and outputting an amplitude signal; and a phase difference information detection unit 32 for detecting information on a phase difference between the vibration signal and the displacement signal and outputting a phase signal. The mixed signal generation unit 30 generates a mixed signal of the amplitude signal and the phase signal. A Z control unit 26 controls a distance between the probe 11 and the sample 19 on the basis of the mixed signal. The mixed signal generation unit 30 can adjust a mixing ratio between the amplitude signal and the phase signal. |
