| 摘要 |
PROBLEM TO BE SOLVED: To detect pressure fluctuation with high sensitivity, while suppressing influences of electromagnetic noise from outside or temperature change.SOLUTION: A pressure sensor 1 includes: a hollow sensor body 2 which has a communication opening 11 communicating the inside and the outside of a cavity; a cantilever 3 which has a lever body 20 and a plurality of lever supporting portions 21 supporting the lever body 20 in a cantilever state, is disposed so as to cover the communication opening 11, and is bent and deformed according to pressure difference between the cavity and the outside of the sensor body 2; and a displacement detection device 4 which has a lever resisting portion 31 and a lever resisting portion 32 formed on the lever supporting portion 21 so as to compose resistances opposite to each other of a HOI=TO circuit, and a body resisting portion 33 connected between the lever resisting portion 31 and the lever resisting portion 32 in the HOI-TO circuit, and detects the displacement of the cantilever 3 on the basis of the resistance value change of the lever resisting portion 31 and the lever resisting portion 32.SELECTED DRAWING: Figure 1 |
