On-chip power converter circuit and on-chip power supply using the power converter circuit

摘要

An on-chip power converter and an on-chip switching power supply implemented using a film bulk acoustic resonator (FBAR) in place of an inductor. This MEMS device offers high inductance density and high Q factor. FBARs can be conveniently fabricated in a CMOS compatible process. FBARs also shows better EMI results than conventional inductors.

主权项

1. An on-chip power converter circuit receiving a direct current (DC) voltage from a power supply and providing a switched power to a load, the converter circuit comprising:
a substrate; one or more switches fabricated on the substrate, connectable to the power supply to receive the DC voltage, and being controllable to provide a variable voltage with a frequency; a film bulk acoustic resonator (FBAR) fabricated on the substrate, coupled to the one or more switches, operable to receive the variable voltage, and provide the switched power near a resonant frequency of the FBAR, the resonant frequency being less than 100M Hz; wherein the FBAR includes a length-extension mode of vibration that is based on a length of the FBAR, and wherein the resonant frequency of the FBAR is substantially defined by the length of the FBAR.