| 发明名称 | Micro-electro-mechanical system (MEMS) structure and design structures | ||
| 摘要 | Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition. | ||
| 申请公布号 | US9496110(B2) | 申请公布日期 | 2016.11.15 |
| 申请号 | US201313920353 | 申请日期 | 2013.06.18 |
| 申请人 | GLOBALFOUNDRIES INC. | 发明人 | Johnson Ward A.;Lary Jenifer E.;Stamper Anthony K.;Watson Kimball M.;Yee Pui L. |
| 分类号 | H03K17/22;H01H59/00;H01H57/00 | 主分类号 | H03K17/22 |
| 代理机构 | Roberts Mlotkowski Safran Cole & Calderon, P.C. | 代理人 | Canale Anthony;Calderon Andrew M.;Roberts Mlotkowski Safran Cole & Calderon, P.C. |
| 主权项 | 1. A method, comprising: applying a first voltage of a single polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition, wherein the first voltage of the single polarity is an actuation voltage applied during a first ON state; and applying a second voltage of a single polarity which is opposite from the polarity of the first voltage to the actuator of the MEMS structure during a subsequent operating condition, wherein the second voltage of the single polarity is an actuation voltage applied during a subsequent ON state. | ||
| 地址 | Grand Cayman KY | ||