| 发明名称 |
AC POWER CONNECTOR, SPUTTERING APPARATUS AND METHOD THEREFOR |
| 摘要 |
An AC power connector for connecting an AC power supply with a device is provided. The AC power connector includes at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second elements being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element. |
| 申请公布号 |
US2016336151(A1) |
申请公布日期 |
2016.11.17 |
| 申请号 |
US201315105894 |
申请日期 |
2013.12.18 |
| 申请人 |
Applied Materals, Inc. |
发明人 |
SCHNAPPENBERGER Frank;HELLMICH Anke;KELLER Stefan;BENDER Marcus |
| 分类号 |
H01J37/32;H01G5/12;H03H7/00;H01J37/34 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An AC power connector for connecting an AC power supply with a device, the AC power connector comprising:
at least one first element connectable with the AC power supply and at least one second element connectable with the device, the first element and the second element being arranged at a first distance with respect to each other for defining a capacitance, wherein the at least one first element and the at least one second element are rotatable with respect to each other, wherein the first element and the second element are configured for a transfer of an AC power between the at least one first element and the at least one second element. |
| 地址 |
Santa Clara CA US |
