发明名称 Evaporator for sublimating materials
摘要 <p>The vaporization arrangement (2) includes at least one pan (3) for receiving a material (4) to be vaporized. A heating device is provided with number of heating rods (5) that are placed above the pan. The heating rods are arranged in a housing formed by a lid and the pan, and supported at both sides in a support ring (6) made of a high-temperature ceramic.</p>
申请公布号 KR100642057(B1) 申请公布日期 2006.11.10
申请号 KR20040027333 申请日期 2004.04.21
申请人 发明人
分类号 C23C14/26;C23C14/24;C23C14/28 主分类号 C23C14/26
代理机构 代理人
主权项
地址