PEDESTAL OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a pedestal of a semiconductor device manufacturing equipment, wherein a sealing member which keeps a hermetic space coming into close contact with a wafer in an etching process is prevented from breaking away from a pedestal main body so as not to cause a process failure. SOLUTION: A wafer is mounted on a pedestal 11, an insertion groove 17 engaged with a sealing member 16 is provided to the outer edge of the pedestal main body 11, the sealing member 16 is possessed of an engaging surface which is engaged with the insertion groove 17, furthermore a catch groove 17a is provided to the insertion groove 17 cut in the pedestal main body 11, and a catch projection 16a engaged with the catch groove 17a is provided to the sealing member 16.