| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring device which highly precisely and speedily measures the fluctuation of a refractive index of oil immersion liquid, and to provide exposure method/device using the measuring device. <P>SOLUTION: The exposure device has a projection optical system projecting a pattern of a mask on a body to be exposed. The device fills liquid between the projection optical system and the body to be exposed, and exposes the body to be exposed through the projection optical system and liquid. The aligner is provided with the measuring device measuring the refractive index of liquid. The measuring device is provided with a cell storing the liquid and penetrating light, and a detector detecting an incident position of light refracted by liquid in the cell. <P>COPYRIGHT: (C)2007,JPO&INPIT |
