APPARATUS FOR MANUFACTURING OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To prevent the volatile components of the adhesives applied to the surfaces of disk substrates to be bonded from being built up in vacuum pumps and piping. SOLUTION: This apparatus has a vacuum vessel 2 internally formed with a bonding chamber 1 for bonding a pair of the disk substrates Da and Db to each other under a vacuum. The apparatus has the plural vacuum pumps 14 and 20 for evacuating the interior of the vessel 2. The apparatus has selector valve means 12 and 18 which select at least one of the plural vacuum pumps 14 and 20, communicate this pump with the interior of the vacuum vessel 2 and shut off the other vacuum pump from the interior of the vacuum vessel 2. The aperture has leak valves 17 and 23 for supplying gas to an exhaust line 5 between the position shut off by the selector valve means 12 and 18 and the respective pumps 14 and 20.