SAMPLE INSPECTION DEVICE AND SAMPLE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a reticle inspection device capable of two-dimensional correction.

SOLUTION: This device is characterized by being equipped with an X-axis laser interferometer 201 and an X-axis laser scale 202 for measuring an X-coordinate position on a reticle 101; a Y-axis laser interferometer 211 and a Y-axis laser scale 212 for measuring a Y-coordinate position on the reticle 101; a laser optical device 103 and a transmitted light detection part 105 or the like used as an optical image acquisition part for acquiring an optical image on the reticle 101; an optical image correction part 140 for correcting the position of the optical image acquired by the optical image acquisition part based on XY-coordinates in a design of a plurality of prescribed positions on the reticle 101 and XY-coordinates of the plurality of prescribed positions measured by the X-axis laser interferometer 201 and the X-axis laser scale 202, and the Y-axis laser interferometer 211 and the Y-axis laser scale 212; and an image comparison part 108 for comparing the optical image with a prescribed reference image on the corrected position.

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