发明名称 SOLID-STATE IMAGE SENSING DEVICE INCLUDING ANTI-REFLECTION STRUCTURE INCLUDING POLYSILICON AND METHOD OF MANUFACTURING THE SAME
摘要 A solid-state image sensing device including an anti-reflection structure that uses polysilicon and a method of manufacturing the same, in which the solid-state image sensing device includes a photodiode region and a transistor region. The photodiode region includes a semiconductor substrate, a first anti-refection layer, a second anti-reflection layer, and a top layer. The first anti-reflection layer is formed on the semiconductor substrate, and the second anti-reflection layer is formed on the first anti-reflection layer. The top layer is formed on the second anti-reflection layer. Each of the semiconductor substrate and the second anti-reflection layer is formed of a first material, and each of the first anti-reflection layer and the top layer is formed of a second material different from the first material.
申请公布号 US2007201137(A1) 申请公布日期 2007.08.30
申请号 US20070679614 申请日期 2007.02.27
申请人 ALEXANDER GETMAN;KIM BUM-SUK;JANG YUN-HO;KIM SAE-YOUNG 发明人 ALEXANDER GETMAN;KIM BUM-SUK;JANG YUN-HO;KIM SAE-YOUNG
分类号 G02B1/10 主分类号 G02B1/10
代理机构 代理人
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