发明名称 |
Detection of Resonator Motion Using Piezoresistive Signal Downmixing |
摘要 |
A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.
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申请公布号 |
US2008216583(A1) |
申请公布日期 |
2008.09.11 |
申请号 |
US20050590485 |
申请日期 |
2005.02.24 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
BARGATIN IGOR;MYERS EDWARD B.;LI MO;ARLETT JESSICA;GUDLEWSKI BENJAMIN;ROUKES MICHAEL L.;YOUNG DARRON K.;TANG HONG X. |
分类号 |
G01B7/16;H01L21/00 |
主分类号 |
G01B7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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