发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>A semiconductor device and a manufacturing method thereof are provided to reduce a thin film transistor area by arranging the thin film transistors having a multi-gate structure in a pixel part. A semiconductor layer(103) comprises a source region, a drain region, a first and second channel forming regions formed among the source region and the drain region, and an intermediate impurity region formed between the first and the second channel forming regions. A gate insulating layer(104) is formed on the semiconductor layer. A gate electrode includes a first conductive layer(105a), a second conductive layer(106b) which comes in contact with the first conductive layer, and a third conductive layer(106c) which comes in contact with the first conductive layer on the gate insulating layer. The first conductive layer is overlapped with at least the first channel forming region, the intermediate impurity region, and the second channel forming region. The second conductive layer is overlapped with the first channel forming region. The third conductive layer is formed apart from the second conductive layer, and is overlapped with the second channel forming region.</p>
申请公布号 KR20060120445(A) 申请公布日期 2006.11.27
申请号 KR20060044536 申请日期 2006.05.18
申请人 SEMICONDUCTOR ENERGY LABORATORY K.K. 发明人 OHNUMA HIDETO;NAGAI MASAHARU;OSAME MITSUAKI;SAKAKURA MASAYUKI;KOMORI SHIGEKI;YAMAZAKI SHUNPEI
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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