发明名称 |
LOW COST HIGH CONDUCTANCE CHAMBER |
摘要 |
A process chamber having high conductance and a method of manufacturing the process chamber are disclosed. The process chamber is machined from a single piece of aluminum where a process cavity and a pump cavity are created by intersecting cylinders. A substrate opening is also created at a bottom of the process cavity to provide conduit for services, such as cooling gas and electrical connections. A large undercut area is formed at a top of the pump cavity between the pump cavity and the process cavity. The undercut extends past the process chamber centerline at the process cavity. A circular saw is used to remove material and create a plenum which extends beyond the process cavity centerline.
|
申请公布号 |
US2009151872(A1) |
申请公布日期 |
2009.06.18 |
申请号 |
US20070958235 |
申请日期 |
2007.12.17 |
申请人 |
SAMIR TUGRUL;BARNES MICHAEL S;BLUCK TERRY |
发明人 |
SAMIR TUGRUL;BARNES MICHAEL S.;BLUCK TERRY |
分类号 |
H01B13/00;B23P17/04;C23C16/54 |
主分类号 |
H01B13/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|