发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUITS INCLUDING GRATING COUPLER FOR OPTICAL COMMUNICATION AND METHODS OF FORMING THE SAME |
摘要 |
Provided are semiconductor integrated circuits including a grating coupler for optical communication and methods of forming the same. The semiconductor integrated circuit includes: a cladding layer disposed on a semiconductor substrate; a grating coupler including an optical waveguide on the cladding layer and a grating on the optical waveguide; and at least one reflector formed in the cladding layer below the grating.
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申请公布号 |
US2009154871(A1) |
申请公布日期 |
2009.06.18 |
申请号 |
US20080117708 |
申请日期 |
2008.05.08 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PYO JUNGHYUNG;KWON O-KYUN;KIM GYUNGOCK |
分类号 |
G02B6/12;H01L21/02 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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