发明名称 ガスバリア性フィルムおよびその製造方法、ならびに前記ガスバリア性フィルムを含む電子デバイス
摘要 PROBLEM TO BE SOLVED: To provide a gas barrier film having superior preservation stability.SOLUTION: A gas barrier film 11 comprises: a substrate 12; a first gas barrier layer 13 which is formed by applying a coating liquid containing a polysilazane compound on the substrate to form a coating film and irradiating the coating film with vacuum-ultraviolet rays; and a second gas barrier layer 14 which is formed by an atomic layer deposition method (ALD method) and contains a metal oxide, which are arranged in this order.
申请公布号 JP5929775(B2) 申请公布日期 2016.06.08
申请号 JP20130023844 申请日期 2013.02.08
申请人 コニカミノルタ株式会社 发明人 門馬 千明;廣瀬 達也
分类号 B32B9/00 主分类号 B32B9/00
代理机构 代理人
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