ELECTROLYTIC DEVICE FOR INDIUM HYDROXIDE POWDER, METHOD FOR PRODUCING INDIUM HYDROXIDE POWDER, AND METHOD FOR PRODUCING SPATTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide an electrolytic device for indium hydroxide powder, in which the indium hydroxide powder having excellent particle size uniformity and a narrow particle size distribution width can be generated.SOLUTION: The electrolytic device 1 for electrolyzing indium to generate indium hydroxide powder includes: an electrolytic cell 10 in which an electrolytic solution 11 is stored and a plurality of electrodes are arranged in parallel at predetermined intervals; an adjustment tank 20 for adjusting the electrolytic solution; an overflow tank 30 for storing the electrolytic solution overflowing the upper part of a tank wall 16b of the electrolytic cell; a feed nozzle 42 which is arranged in the vicinity of a liquid level of the electrolytic solution of the electrolytic cell and used for feeding the electrolytic solution to, at least, the space between electrodes; a withdrawal port 19 which is arranged at a tub bottom 14 of the electrolytic cell and used for withdrawing the electrolytic solution; and another withdrawal port 32 for the overflow tank, which port is arranged at the overflow tank and is used for withdrawing the electrolytic solution. The electrolytic solution is withdrawn from the adjustment tank and jetted through the feed nozzle toward the tub bottom of the electrolytic cell in the vertical direction and the electrolytic solution in the electrolytic cell is withdrawn and transferred to the adjustment tank so that the electrolytic solution is circulated between the electrolytic cell and the adjustment tank.SELECTED DRAWING: Figure 1