| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from falling from a spinner table which rotates at a high speed together with a frame.SOLUTION: Frame holding means 30 included in a washing device 2A cleaning a wafer W includes a frame support part 31 which supports a lower part 4b of a frame 4, and a plurality of frame press parts 32 which press an upper part 4a of the frame 4, and are arranged at equal angle intervals around the center of rotation of a spinner table 20. Each of the frame press parts 32 includes an arm part 300, a claw part 310 formed at an upper part 301 and pressing the frame 4, a weight part 320 formed at a low part 302, and a fulcrum shaft 330 supporting the arm part 300 rotatably so that the claw part 310 presses the upper part 4a of the frame 4. The weight part 320 has a blade 321 formed so as to generate lift force during rotation of the spinner table 20 in addition to centrifugal force, and the frame press part 32 presses the frame 4 to prevent the wafer W from falling from the spinner table 20. |
