发明名称 SPACING DEVICE AND SPACING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a spacing device and a spacing method capable of preventing the device from up-sizing as much as possible.SOLUTION: A spacing device 10 for spreading the mutual interval of a plurality of flaky bodies CP formed of plate-like members WF, by applying tension to the plate-like member WF on an adhesive sheet AS in at least two tension directions includes a plurality of holding means 20 for holding the adhesive sheet AS by respective holding members 21. At least one holding means 20 is provided so as to be able to apply tension to the adhesive sheet AS, by moving the adhesive sheet AS for the holding members 21.SELECTED DRAWING: Figure 1
申请公布号 JP2016127123(A) 申请公布日期 2016.07.11
申请号 JP20140266371 申请日期 2014.12.26
申请人 LINTEC CORP 发明人 MENJU TOSHIAKI
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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