| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve optimal measurement assumed by teaching even when an object is shifted in measuring in noncontact. <P>SOLUTION: In the three-dimensional measuring method, using a noncontact sensor and a sensor moving mechanism that changes the position and attitude of the sensor and can be numerically controlled, the noncontact sensor is moved according to measurement course information indicating a plurality of positions preset by teaching and the sensor attitude in each position, and the shape of the object is measured in noncontact. Three-dimensional preliminary measurement of the object is performed according to preliminary measurement course information, positional shift between the object and an assumed object is detected based on the shape data obtained by three-dimensional preliminary measurement and the shape data of the assumed object to be measured by teaching, the measurement course information is corrected according to the detected positional shift, and three-dimensional measurement of the object is performed according to the corrected measurement course information. <P>COPYRIGHT: (C)2007,JPO&INPIT |
