Method for making epitaxial structure

摘要

A method for making an epitaxial structure is provided. The method includes the following steps. A substrate having an epitaxial growth surface is provided. A carbon nanotube layer is placed on the epitaxial growth surface. An epitaxial layer is epitaxially grown on the buffer layer. The substrate and the carbon nanotube layer are removed to expose the epitaxial layer.

主权项

1. A method for making an epitaxial structure, the method comprising:
providing a substrate having an epitaxial growth surface; forming a buffer layer on the epitaxial growth surface; placing a first carbon nanotube layer on the buffer layer; epitaxially growing a first epitaxial layer on the buffer layer; placing a second carbon nanotube layer on the first epitaxial layer; epitaxially growing a second epitaxial layer on the first epitaxial layer; and removing the substrate and the first carbon nanotube layer.