发明名称 Electrostatic discharge protection structure
摘要 Provided is an electrostatic discharge (ESD) protection structure including a substrate, a pick-up region, a first MOS device, a second MOS device, a first doped region and a second doped region. The pick-up region is located in the substrate. The first MOS device has a first drain region of a first conductivity type located in the substrate. The second MOS device has a second drain region of the first conductivity type located in the substrate. The first drain region is closer to the pick up region than the second drain region is. The first doped region of a second conductivity type is located under the first doped region. The second doped region of the second conductivity type is located under the second doped region. The area and/or doping concentration of the first doped region is greater than that of the second doped region.
申请公布号 US9449960(B2) 申请公布日期 2016.09.20
申请号 US201313937142 申请日期 2013.07.08
申请人 United Microelectronics Corp. 发明人 Wen Yung-Ju;Wang Chang-Tzu;Tang Tien-Hao
分类号 H01L21/70;H01L27/02 主分类号 H01L21/70
代理机构 J.C. Patents 代理人 J.C. Patents
主权项 1. An electrostatic discharge (ESD) protection structure, comprising: a substrate; a pick-up region, located in the substrate; a first MOS device, located on the substrate and comprising a first drain region and a first source region of a first conductivity type; a second MOS device, located on the substrate and comprising a second drain region and a second source region of the first conductivity type, wherein the first drain region is closer to the pick-up region than the second drain region is; a first doped region of a second conductivity type, located only under the first drain region; and a second doped region of the second conductivity type, located only under the second drain region, wherein an area, a doping concentration or both of the first doped region are greater than an area, a doping concentration or both of the second doped region, wherein there is only one doped region of the second conductivity type under each drain region of the first conductivity type, wherein the first doped region and the second doped region are disposed in the substrate, and a doping concentration of the first doped region and a doping concentration of the second doped region are different from a doping concentration of the substrate which surrounds the first and second doped regions.
地址 Hsinchu TW